Ultrapure Water System Outline of Ultrapure Water System Electro-Deionization Unit (EDI Unit) Products Electrostatic Precipitator Fabric filters Tunnel Electrostatic Precipitator Organic Solvent Exhaust Gas Treatment System Water Treatment Outline of Water Treatment Pretreatment Ion Exchanger Demineralizer RO-Membrane Desalination Ultrapure Water System Outline of Ultrapure Water System Electro-Deionization Unit (EDI Unit) Cooling Water Treatment System Wastewater Treatment System